WebDr.LiTHO employs a user concept based on the modern programming language Python. This approach offers wide portability, various methods for parallelization, easy-to-use visualization components ... WebDr.LiTHO is a comprehensive simulation environment for photolithography, developed at the Fraunhofer IISB. Its main focus is on development and research applications. Dr.LiTHO …
Dr.LiTHO - A development and research lithography simulator
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Fraunhofer IISB Lithography Simulation Workshop 2024
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